SCOPUS 정보 검색 플랫폼

Volumn 161, Issue , 2000, Pages 952-957

O2 cluster ion-assisted deposition for tin-doped indium oxide films

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DENSITY (SPECIFIC GRAVITY); INDIUM COMPOUNDS; ION BEAMS; ION BOMBARDMENT; IONS; KINETIC ENERGY; OXIDATION; OXYGEN; SURFACES; THIN FILMS; TIN;

ENERGETIC CLUSTER ION BOMBARDMENT; GAS CLUSTER ION ASSISTED DEPOSITION; ION ASSISTED THIN FILM FORMATION; TIN DOPED INDIUM OXIDE FILMS;

DEPOSITION;

EID: 0033877934 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(99)00901-5 Document Type: Article

Times cited : (28)

References (15)

1
- 0032119663
- 2 cluster ion-assisted deposition
- 2 cluster ion-assisted deposition, Mater. Chem. Phys. 54 (1998) 258.
- (1998) Mater. Chem. Phys. , vol.54 , pp. 258
- Qin, W.¹ Howson, R.P.² Akizuki, M.³ Maastuo, J.⁴ Takaoka, G.⁵ Yamada, I.⁶

2
- 0030079669
- M. Akizuki, J. Matsuo, I. Yamada, M. Harada, S. Ogasawara, A. Doi, Jpn. J. Appl. Phys. 35 (1996) 1450.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 1450
- Akizuki, M.¹ Matsuo, J.² Yamada, I.³ Harada, M.⁴ Ogasawara, S.⁵ Doi, A.⁶

3
- 33846996719
- M. Akizuki, J. Matsuo, M. Harada, S. Ogasawara, A. Doi, K. Yoneda, T Yamaguchi, G.H. Takaoka, C.E. Ascheron, I. Yamada, Nucl. Instr. and Meth. B 99 (1995) 229.
- (1995) Nucl. Instr. and Meth. B , vol.99 , pp. 229
- Akizuki, M.¹ Matsuo, J.² Harada, M.³ Ogasawara, S.⁴ Doi, A.⁵ Yoneda, K.⁶ Yamaguchi, T.⁷ Takaoka, G.H.⁸ Ascheron, C.E.⁹ Yamada, I.¹⁰

4
- 0003281689
- J. Matsuo, W. Qin, M. Akizuki, T. Yodoshi, I. Yamada, Mat. Res. Soc. Symp. Proc. 504 (1997) 87.
- (1997) Mat. Res. Soc. Symp. Proc. , vol.504 , pp. 87
- Matsuo, J.¹ Qin, W.² Akizuki, M.³ Yodoshi, T.⁴ Yamada, I.⁵

5
- 0000126123
- I. Yamada, W.L. Brown, J.A. Northby, M. Sosnowski, Nucl. Instr. and Meth. B 79 (1993) 223.
- (1993) Nucl. Instr. and Meth. B , vol.79 , pp. 223
- Yamada, I.¹ Brown, W.L.² Northby, J.A.³ Sosnowski, M.⁴

6
- 0031546165
- H. Kitani, N. Toyoda, J. Matsuo, I. Yamada, Nucl. Instr. and Meth. B 121 (1997) 489.
- (1997) Nucl. Instr. and Meth. B , vol.121 , pp. 489
- Kitani, H.¹ Toyoda, N.² Matsuo, J.³ Yamada, I.⁴

7
- 0031546234
- T. Aoki, J. Matsuo, Z. Insepov, I. Yamada, Nucl. Instr. and Meth. B 121 (1997) 49.
- (1997) Nucl. Instr. and Meth. B , vol.121 , pp. 49
- Aoki, T.¹ Matsuo, J.² Insepov, Z.³ Yamada, I.⁴

8
- 5844321304
- I. Yamada, J. Matsuo, Z. Insepov, D. Takeuchi, M. Akizuki, N. Toyoda, J. Vac. Sci. Technol A 14 (1996) 781.
- (1996) J. Vac. Sci. Technol A , vol.14 , pp. 781
- Yamada, I.¹ Matsuo, J.² Insepov, Z.³ Takeuchi, D.⁴ Akizuki, M.⁵ Toyoda, N.⁶

9
- 0141558784
- R. Beuhler, L. Friedman, Chem. Rev. 86 (1986) 521.
- (1986) Chem. Rev. , vol.86 , pp. 521
- Beuhler, R.¹ Friedman, L.²

10
- 36449000155
- F. Hagena, Rev. Sci. Instrum. 63 (1992) 2374.
- (1992) Rev. Sci. Instrum. , vol.63 , pp. 2374
- Hagena, F.¹

11
- 10044287856
- R.B.H. Tahar, T. Ban, Y. Ohya, Y. Takahashi, J. Appl. Phys. 83 (1998) 2631.
- (1998) J. Appl. Phys. , vol.83 , pp. 2631
- Tahar, R.B.H.¹ Ban, T.² Ohya, Y.³ Takahashi, Y.⁴

12
- 0001310591
- Y. Kawai, N. Konishi, J. Watanabe, T. Ohmi, Appl. Phys. Lett. 64 (1994) 2223.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2223
- Kawai, Y.¹ Konishi, N.² Watanabe, J.³ Ohmi, T.⁴

13
- 0000060692
- S. Todorov, E.R. Fossum, J. Vac. Soc. Technol. B 6 (1988) 466.
- (1988) J. Vac. Soc. Technol. B , vol.6 , pp. 466
- Todorov, S.¹ Fossum, E.R.²

14
- 0022603487
- S. Kimura, E. Murakami, T. Warabisako, H. Sunami, T. Tokuyama, IEEE Electron Device Lett. EDL-7 (1986) 38.
- (1986) IEEE Electron Device Lett. , vol.EDL-7 , pp. 38
- Kimura, S.¹ Murakami, E.² Warabisako, T.³ Sunami, H.⁴ Tokuyama, T.⁵

15
- 0032298603
- N. Taga, M. Maekawa, Y. Shigesato, I. Yasui, M. Kakei, T.E. Haynes, Jpn. J. Appl. Phys. 37 (1998) 6524.
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 6524
- Taga, N.¹ Maekawa, M.² Shigesato, Y.³ Yasui, I.⁴ Kakei, M.⁵ Haynes, T.E.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.