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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 A, 2003, Pages 3619-3620

Growth and characterization of indium tin oxide films grown on polymer substrates by DC magnetron sputtering

(2) Bhaumik, Suchandra a Barua, Asok K a

a DEPARTMENT OF MATERIALS SCIENCE (India)

Author keywords

DC magnetron sputtering; Indium tin oxide; Polymer substrates; Scanning electron microscopy (SEM); Sheet resistance; Transmittance

Indexed keywords

ACRYLICS; CARRIER CONCENTRATION; CARRIER MOBILITY; CHARACTERIZATION; FILM GROWTH; HALL EFFECT; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

FILM THICKNESS; HALL MOBILITY; INDIUM TIN OXIDE FILM; SHEET RESISTANCE;

THIN FILMS;

EID: 0041379600 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.3619 Document Type: Article

Times cited : (7)

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