Scanning electron microscopy for materials characterization

Current Opinion in Solid State and Materials Science

Volumn 2, Issue 4, 1997, Pages 465-468

  Joy, David C ^a  

^a Cell Molec B ^*  (United States)

Author keywords

SEM scanning electron microscope

Indexed keywords

EID: 0040054323     PISSN: 13590286     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-0286(97)80091-5     Document Type: Article

References (47)

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5. 4 on a surface of dissolving fluorapatite crystals studied by SEM. SCANNING. 18:1996;119-124.
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7. Joy DC. Monte Carlo Simulation for Microscopy and Microanalysis. 1995;Oxford University Press, New York.
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16. Saparin GV, Obyden SK. Morphologic and cathodoluminescence studies of diamond films by scanning electron microscopy. SCANNING. 17:1995;337-348.
17. Drouin D, Gauvin R, Beauvais J, Hovington P, Joy DC. Characterization of Schottky depletion zone using EBIC imaging. Bailey GW, Corbett JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;150-152 San Francisco Press Inc, San Francisco.
18. Hardingham C. Use of electron-beam induced current in a SEM for analysis of space solar cells. J Mater Sci. 31:1996;861-866 Excellent demonstration of the power of the EBIC technique in the SEM for the characterization of complex three-dimensional device structures.
19. Joy DC, Newbury DE, Davidson DL. Electron channeling patterns in the scanning electron microscope. J Appl Phys. 53:1982;R81-R102.
20. Watanabe T. SEM-ECP analysis of grain-boundary character distribution in polycrystalline materials. Bailey GW, Corbett JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;354-356 San Francisco Press Inc, San Francisco.
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25. Sutcliff JA, Bewlay BP. Orientation imaging of a Nb-Ti-Si directionally solidified in-situ composite. Bailey GW, Corbett JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;350-351 San Francisco Press Inc, San Francisco, Good illustration of the power of the orientation imaging technique for materials characterization.
26. Wright SI, Dingley DJ, Field DP. Determination deformation, recovery and recrystallization from orientation imaging microscopy. Bailey GW, Corbett JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;352-354 San Francisco Press Inc, San Francisco.
27. Caul MV, Randle V. Grain boundary characterization in austenitic steel. Bailey GW, Corbertt JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;344-345 San Francisco Press Inc, San Francisco, Quantitative analysis of grain boundary quality and character using EBSP techniques.
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31. Butler JH, Joy DC, Bradley GF, Krause SJ. Low voltage scanning electron microscopy of polymers. Polymer. 36:1995;1781-1790.
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33. Wergin WP, Rango A, Erbe EF. Use of low temperature SEM to observe icicles, ice frabric, rime, and frost. Bailey GW, Corbett JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;146-147 San Francisco Press Inc, San Francisco, Beautiful application of the SEM to the study of the fragile and complex microstructure of snow, ice and frost. A technical tour de force.
34. Wilson AR. Monte Carlo and finite element calculations of X-ray production at interfaces in bulk materials. Ultramicrosc. 66:1996;117-131 A demonstration that the spatial resolution limit to microanalysis set by electron - solid interactions does not prevent the observation of small features provided that conditions are properly optimized.
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36. Turan R, Perovic DD, Houghton DC. Mapping electrically active dopant profiles by field emission SEM. Appl Phys Lett. 69:1996;1593-1595 Secondary electron signals can reveal the presence of dopants at levels consistent with those used in device fabrication. An important new analytical tool in the SEM.
37. Schroeder SLM. Towards a 'universal curve' for total electron-yield XAS. Solid State Commun. 98:1996;405-409 Analysis of the behavior of the emitted secondary electron signal as it is affected by Auger emissions. In conjunction with reference [36] this provides a prototype new technique for microanalysis in the SEM.
38. Meredith P, Donald AM. Study of 'wet' polymer latex in the environmental SEM. J Microsc. 181:1996;23-36 Demonstration of the power of the ESEM to study real world problems.
39. Meredith P, Donald AM, Thield B. Electron-gas interactions in the ESEM gaseous detector. SCANNING. 18:1996;467-473 Good analysis of the complex interactions encountered by electrons in the gas of the ESEM.
40. Joy DC. Modeling the electron-gas interaction in low-vacuum SEM. Bailey GW, Corbett JM, Dimlich R, Michael JR, Zaluzec NJ. Microscopy and Microanalysis 1996. 1996;836-837 San Francisco Press Inc, San Francisco.
41. Newbury DE. Imaging deep holes in structures in the ESEM. SCANNING. 18:1996;474-483 The conversion of secondary electrons to ions in the gas of the ESEM specimen chamber makes it possible to form satisfactory images from the bottom of holes several millimeters in depth.
42. 2S attack on the protective oxide of an Ni-Fe alloy. SCANNING. 18:1996;497-500 Good real world application of ESEM technology.
43. Neubauer CM, Jennings HM. The role of the ESEM in the investigation of cement-based materials. SCANNING. 18:1996;515-521 Application of the ESEM to the classic problem of the behavior of cement and related materials.
44. D'Emmanuele A, Gilpin C. Applications of the ESEM to the analysis of pharmaceutical formulations. SCANNING. 18:1996;522-528.
45. Hoyberg K. ESEM of personal and household products. SCANNING. 19:1996;109-113 Interesting demonstration of the versatility of the ESEM for the characterization of consumer products.
46. Folch A, Servat J, Esteve J, Tejada J, Seco M. High vacuum versus environmental electron beam deposition. J Vac Sci Technol B. 14:1996;2609-2614 Organometallic gases deposit metal films on to a substrate under electron beam impact in the SEM. A new tool for lithography and localized chemistry.
47. Paul BK, Klimkiewicz M. Application of ESEM to micro-mechanical fabrication. SCANNING. 18:1996;490-496 The use of the ESEM to build three-dimensional nano-scaled structures using selective deposition and radiation techniques.