Measurement of elastic strains and small lattice rotations using electron back scatter diffraction

Ultramicroscopy

Volumn 62, Issue 4, 1996, Pages 237-247

  Wilkinson, Angus J ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; ELECTRON MICROSCOPES; SCANNING ELECTRON MICROSCOPY; SILICON; STRAIN MEASUREMENT; SUBSTRATES; X RAY DIFFRACTION;

BRAGG ANGLE; ELASTIC STRAINS; ELECTRON BACK SCATTER DIFFRACTION; SMALL LATTICE ROTATIONS;

ELECTRON DIFFRACTION;

ARTICLE; CRYSTAL; ELASTICITY; ELECTRON DIFFRACTION; MEASUREMENT;

EID: 0030111195     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/0304-3991(95)00152-2     Document Type: Article

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