Transient grating measurements of film thickness in multilayer metal films

Journal of Applied Physics

Volumn 90, Issue 9, 2001, Pages 4392-4402

  Slayton, Rebecca M ^a   Nelson, Keith A ^a   Maznev, A A ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Malvern Instruments Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039741877     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1399031     Document Type: Article

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