High-precision film thickness determination using a laser-based ultrasonic technique

Applied Physics Letters

Volumn 73, Issue 2, 1998, Pages 169-171

  Banet, Matthew J ^a   Fuchs, Martin ^a   Rogers, John A ^b   Reinold Jr , James H ^c   Knecht, Jeffrey M ^c   Rothschild, Mordechai ^c   Logan, Randy ^c   Maznev, A A ^c   Nelson, Keith A ^c  

^a Active Impulse Systems   (United States)

^b HARVARD UNIVERSITY   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000297615     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121780     Document Type: Article

References (15)

1. J. J. Estabil and M. Keefer, Solid State Technol. 38, 71 (1995).
2. A. R. Duggal, J. A. Rogers, and K. A. Nelson, J. Appl. Phys. 72, 2823 (1992).
3. J. A. Rogers and K. A. Nelson, J. Appl. Phys. 75, 1534 (1994).
4. J. A. Rogers and K. A. Nelson, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 42, 555 (1995);
5. J. Adhes. 50, 1 (1995);
6. J. Polym. Sci., Part B: Polym. Phys. 34, 861 (1996);
7. Y. Yang, K. A. Nelson, and F. Adibi, J. Mater. Res. 10, 41 (1995).
8. J. S. Meth, C. D. Marshall, and M. D. Fayer, J. Appl. Phys. 67, 3362 (1990);
9. J. S. Meth, C. D. Marshall, and M. D. Fayer, Chem. Phys. Lett. 162, 306 (1989).
10. A. Harata and T. Sawada, Jpn. J. Appl. Phys., Part 1 32, 2188 (1993);
11. A. Harata, H. Nishimura, and T. Sawada, Appl. Phys. Lett. 57, 132 (1990).
12. O. W. Kading, H. Skurk, A. A. Maznev, and E. Matthias, Appl. Phys. A: Mater. Sci. Process. 61, 253 (1995).
13. J. A. Rogers, M. Fuchs, M. J. Banet, J. B. Hanselman, R. Logan, and K. A. Nelson, Appl. Phys. Lett. 71, 225 (1997).
14. H. T. Grahn, H. J. Maris, and J. Tauc, IEEE J. Quantum Electron. 25, 2562 (1989).
15. G. W. Farnell and E. L. Adler, in Physical Acoustics, Principles and Methods, edited by W. P. Mason and R. N. Thurston (Academic, New York, 1972), Vol. 9, p. 35.