AlAs/GaAs layered structures for SAW sensors

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 313-318

  Jungnickel, F ^a   Makarov, S ^b   Chilla, E ^a   Frohlich H J ^a  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

Aluminium arsenide; Gallium arsenide; Surface acoustic wave sensors

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE VELOCITY MEASUREMENT; ALGORITHMS; HETEROJUNCTIONS; MATRIX ALGEBRA; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE;

SURFACE ACOUSTIC WAVE (SAW) SENSORS;

ACOUSTIC TRANSDUCERS;

EID: 0031165499     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80281-6     Document Type: Article

References (12)

1. M.J. Vellekoop, G.W. Lubking, P.M. Sarro and A. Venema, Integrated-circuit-compatible design and technology of acousticwave-based microsensors, Sensors and Actuators A, 44 (1994) 249-263.
2. J. Enderlein, J. Schönberg, E. Chilla and H.-J. Fröhlich, Integrable SAW sensor with identification facility, IEEE Proc. Ultrasonics Symp., Cannes, France, 1994, pp. 491-494.
3. J. Enderlein, S. Makarov, E. Chilla and H.-J. Fröhlich, Mass sensitivity of temperature-stabilized surface acoustic wave delay lines on GaAs, Sensors and Actuators B, 24-25 (1995) 65-68.
4. C. Thompson and B.L. Weiss, Characteristics of surface wave propagation in III-V semiconductor quantum well structures, J. Appl. Phys., 78 (1995) 5002-5007.
5. Y. Kim and W.D. Hunt, An analysis of surface acoustic wave propagation in a piezoelectric film over a GaAs/AlGaAs heterostructure, J. Appl. Phys., 71 (1992) 2136-2142.
6. E.L. Adler, Matrix method applied to acoustic waves in multilayers, Proc. IEEE Ultrasonics Symp., Montreal, Quebec, Canada, 1989, pp. 367-372.
7. S. Makarov, E. Chilla and H.-J. Fröhlich, Determination of elastic constants of thin films from phase velocity dispersion of different surface acoustic wave modes, J. Appl. Phys., 78 (1995) 5028-5034.
8. A.J. Slobodnik, E.D. Convay and R.T. Delmonico, Microwave Acoustic Handbook I, NTIS, Springfield, VA, 1973.
9. R.T. Webster and P.H. Carr, Rayleigh waves on gallium arsenide, in E.A. Ash and E.G.S. Paige (eds.), Rayleigh-Wave Theory and Application, Springer, Berlin, 1985, pp. S. 122-130.
10. D. Schneider, H. Ollendorf and T. Schwarz, Non-destructive evaluation of the mechanical behaviour of TiN-coated steels by laser-induced ultrasonic surface waves, Appl. Phys. A, 61 (1995) 277-284.
11. G.W. Farnell and E.L. Adler, Elastic wave propagation in thin layers, in W.P. Mason and R.N. Thurston (eds.), Physical Acoustics, Vol. 9, Academic Press, New York, 1972, pp. 35-127.
12. J.O. Kim and J.D. Achenbach, Line focus acoustic microscopy to measure anisotropic acoustic properties of thin films, Thin Solid Films, 214 (1992) 25-34.