Improvement of the cantilever beam technique for stress measurement during the physical vapor deposition process

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 736-742

  Moulard, G ^a   Contoux, G ^a   Motyl, G ^a   Gardet, G ^a   Courbon, M ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032369676     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581053     Document Type: Article

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