Surface metrology using reflected ultrasonic signals in air

Ultrasonics

Volumn 39, Issue 7, 2002, Pages 479-486

  Robertson, T J ^a   Hutchins, D A ^a   Billson, D R ^a   Rakels, J H ^a   Schindel, D W ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b MicroAcoustic Instruments Inc   (Canada)

Author keywords

Air coupled; Capacitance; Metrology; Transducer

Indexed keywords

ASSEMBLY; BANDWIDTH; CAPACITANCE; TRANSDUCERS; ULTRASONIC REFLECTION;

ULTRASONIC SIGNALS;

ULTRASONICS;

EID: 0036539776     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(01)00086-5     Document Type: Article

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