Capacitive micromachined ultrasonic transducers with integrated optoelectronic readout

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2001, Pages 875-881

  Levent Degertekin, F ^a   Hall, Neal A ^a   Lee, Wook ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; DIFFRACTION GRATINGS; INTEGRATED OPTOELECTRONICS; INTERFEROMETERS; INTERFEROMETRY; PHOTODETECTORS; QUARTZ; READOUT SYSTEMS; SEMICONDUCTOR LASERS; SILICON; SUBSTRATES;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; FABRY-PEROT CAVITY; INTEGRATED OPTOELECTRONIC READOUT; MULTI-PASS INTERFEROMETER; OPTICAL ANALYSIS; PHASE-SENSITIVE OPTICAL DIFFRACTION GRATING; VERTICAL CAVITY SURFACE EMITTING LASER;

ULTRASONIC TRANSDUCERS;

EID: 0035731437     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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