Growth and properties of PbTiO3/Pb(Zr, Ti)O3 heterostructures deposited by sputtering on Si substrates

Integrated Ferroelectrics

Volumn 23, Issue 1, 1999, Pages 1-14

  Velu, G ^a   Haccart, T ^a   Remiens, D ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC PROPERTIES OF SOLIDS; FATIGUE OF MATERIALS; FERROELECTRICITY; FILM GROWTH; HETEROJUNCTIONS; MAGNETRON SPUTTERING; PHASE COMPOSITION; SILICON; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

BUFFER LAYER; LEAD TITANATE; LEAD ZIRCONIUM TITANATE; RADIOFREQUENCY MAGNETRON SPUTTERING;

LEAD COMPOUNDS;

EID: 0033293083     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908210136     Document Type: Article

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