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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 6073-6076

Preparation and piezoelectric property of lead titanate thin films for GHz-band resonators

(7) Yamada, Akira a Maeda, Chisako a Umemura, Toshio a Uchikawa, Fusaoki a Misu, Koichiro a Wadaka, Shusou a Ishikawa, Takahide a

a MITSUBISHI ELECTRIC CORPORATION (Japan)

Author keywords

GaAs; GHz band resonator; Lead titanate film; Membrane structure; Piezoelectric; Sputtering

Indexed keywords

ACOUSTIC RESONATORS; CERAMIC MATERIALS; FILM PREPARATION; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; RESIDUAL STRESSES; SEMICONDUCTING GALLIUM ARSENIDE; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

ELECTROMECHANICAL COUPLING COEFFICIENTS; FILM BULK ACOUSTIC WAVE RESONATORS (FBAWR); LEAD TITANATE;

DIELECTRIC FILMS;

EID: 0031224417 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.6073 Document Type: Article

Times cited : (14)

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