Effect of thermal annealing on the electronic properties of nitrogen doped amorphous carbon/p-type crystalline silicon heterojunction diodes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 3, 2003, Pages 582-588

  Valentini, L ^a   Lozzi, L ^b   Salerni, V ^b   Armentano, I ^a   Kenny, J M ^a   Santucci, S ^b  

^a UNIVERSITY OF PERUGIA   (Italy)

^b UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CARBON; CRYSTALLINE MATERIALS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRONIC PROPERTIES; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE SILICON; HETEROJUNCTION DIODE; HYDROGENATED AMORPHOUS CARBON; NITROGEN DOPED AMORPHOUS CARBON FILM;

SEMICONDUCTOR DIODES;

EID: 0038613491     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1562477     Document Type: Article

References (32)

1. T. Soga, T. Jimbo, K. M. Krishna, and M. Umeno, Int. J. Mod. Phys. B 14, 206 (2000).
2. V. S. Veerasamy, G. A. J. Amaratunga, J. S. Park, W. I. Milne, H. S. MacKenzie, and D. R. McKenzie, Appl. Phys. Lett. 64, 2297 (1994).
3. M. Maldei and D. C. Ingram, Conference on Photovoltaic Cell, p. 1258.
4. N. Konofaos and C. B. Thomas, J. Appl. Phys. 81, 6238 (1997).
5. T. Soga, T. Jimbo, K. M. Krishna, and M. Umeno, Carbon 37, 531 (1999).
6. B Meyerson and F. W. Smith, J. Non-Cryst. Solids 35/36, 435 (1980).
7. A. Helmold, P. Hammer, J. U. Thiele, K. Rowher, and D. Meissner, Philos. Mag. B 72, 335 (1995).
8. J. Robertson, Adv. Phys. 35, 317 (1986).
9. J. Robertson and E. P. O'Reilly, Phys. Rev. B 35, 2946 (1987).
10. M. A. Baker and P. Hammer, Surf. Interface Anal. 25, 629 (1997).
11. A. Mansour and D. Ugolini, Phys. Rev. B 47, 10201 (1993).
12. D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, Phys. Rev. Lett. 73, 118 (1994).
13. W. T. Zheng, H. Sjostrom, I. Ivanov, K. Z. Xing, E. Broitmen, W. R. Salaneck, J. E. Green, and J. E. Sundgren, J. Vac. Sci. Technol. A 14, 2696 (1996).
14. C. Ronning, H. Feldermann, R. Merk, H. Hofsass, P. Reinke, and J. U. Thiele, Phys. Rev. B 58, 2207 (1998).
15. P. Hammer, N. M. Victoria, and F. Alvarez, J. Vac. Sci. Technol. A 16, 2941 (1998).
16. A. K. M. S. Chowdhury, D. C. Cameron, and M. S. J. Hashmi, Thin Solid Films 332, 62 (1998).
17. A. K. M. S. Chowdhury, D. C. Cameron, and M. A. Monclus, Thin Solid Films 355-356, 85 (1999).
18. M. A. Monclus, D. C. Cameron, A. K. M. S. Chowdhury, R. Barkley, and M. Collins, Thin Solid Films 355-356, 79 (1999).
19. S. Souto, M. Pickholz, M. C. dos Santos, and F. Alvarez, Phys. Rev. B 57, 2536 (1998).
20. P. Hammer, N. M. Victoria, and F. Alvarez, J. Vac. Sci. Technol. A 16, 2941 (1998)
21. B. Dischler, A. Bubenzer, and P. Koidl, Solid State Commun. 48, 105 (1983).
22. R. O. Dillon, J. A. Woollam, and V. Katkanant, Phys. Rev. B 29, 3482 (1984).
23. D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev. B 30, 870 (1984).
24. A. C. Ferrari and J. Robertson, Phys. Rev. B 64, 075414 (2001).
25. S. E. Rodil et al., J. Appl. Phys. 89, 5425 (2001).
26. L. G. Jacobson, F. L. Freire, D. F. Franceschini, M. M. Lacerda, and G. Mariotto, J. Vac. Sci. Technol. A 17, 545 (1999).
27. F. L. Freire, G. Mariotto, R. S. Brusa, A. Zecca, and C. A. Achete, Diamond Relat. Mater. 4, 499 (1995).
28. S. Santucci, L. Lozzi, L. Valentini, J. M. Kenny, and A. Menelle, Appl. Phys. A: Mater. Sci. Process. 75, 1 (2002).
29. K. Siegbahn, C. Nordling, A. Fahlman, R. Nordberg, K. Hamrin, J. Hedman, G. Johansson, T. Bergmark, S.-E. Karlsson, I. Lindgren, and B. Lindberg, ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy (Almqvist & Wiksells Boktryckeri AB, Uppsala, 1967).
30. B. C. Holloway, Ph.D. thesis, Leland Stanford Jr. University, 1997.
31. H. Sjostrom, L. Hultman, J. E. Sundgren, S. V. Hainsworth, T. F. Page, and G. S. A. M. Theunissen, J. Vac. Sci. Technol. A 14, 56 (1996).
32. A. C. Ferrari and J. Robertson, Phys. Rev. B 61, 14095 (2000).