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Volumn 97, Issue 1-4, 2003, Pages 113-118
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Calibration of AFM cantilever spring constants
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Author keywords
Cantilever; Q factor; Resonant frequency and spring constant
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Indexed keywords
ELASTIC MODULI;
GOLD;
NATURAL FREQUENCIES;
SPRINGS (COMPONENTS);
THICKNESS MEASUREMENT;
THIN FILMS;
CANTILEVERS;
ATOMIC FORCE MICROSCOPY;
GOLD;
ACCURACY;
ANALYTIC METHOD;
ANALYTICAL PARAMETERS;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
CALIBRATION;
CHEMICAL ANALYSIS;
CHEMICAL PARAMETERS;
DENSITY;
FILM;
MATHEMATICAL ANALYSIS;
PHYSICAL CHEMISTRY;
RELIABILITY;
THICKNESS;
YOUNG MODULUS;
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EID: 0038542816
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/S0304-3991(03)00035-4 Document Type: Article |
Times cited : (45)
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References (32)
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