Design of a fast in situ infrared diagnostic tool

Review of Scientific Instruments

Volumn 74, Issue 5, 2003, Pages 2675-2684

  Van Hest, M F A M ^a   Klaver, A ^a   Schram, D C ^a   Van de Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MONOLAYERS; OPTICAL RESOLVING POWER; PLASMA APPLICATIONS; PYROLYSIS; SCANNING;

INFRARED DIAGNOSTIC TOOLS;

INFRARED SPECTROMETERS;

EID: 0038527413     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1564273     Document Type: Article

References (31)

1. M. Meier and A. von Keudell, J. Appl. Phys. 90, 3585 (2001).
2. H. Ohta, M. Hori, and T. Goto, J. Appl. Phys. 90, 1955 (2001).
3. P. Scheible and A. Lunk, Thin Solid Films 364, 40 (2000).
4. N. J. Harrick, Internal Reflection Spectroscopy (Wiley, New York, 1967).
5. J. R. During, Applications of FT-IR Spectroscopy (Elsevier, Amsterdam, 1990).
6. S. A. Francis and A. H. Ellison, J. Opt. Soc. Am. 49, 131 (1959).
7. Y. Toyoshima, K. Arai, A. Matsuda, and K. Tanaka, Appl. Phys. Lett. 56, 1540 (1990).
8. N. Maley, I. Szafranek, L. Mandrell, M. Katiyar, J. R. Abelson, and J. R. Thornton, J. Non-Cryst. Solids 114, 163 (1989).
9. J. W. A. M. Gielen, P. R. M. Kleuskens, M. C. M. van de Sanden, L. J. van Ijzendoorn, D. C. Schram, E. H. A. Dekempeneer, and J. Meneve, J. Appl. Phys. 80, 5986 (1996).
10. W. M. M. Kessels, A. H. M. Srnets, B. A. Korevaar, G. J. Adriaenssens, M. C. M. van de Sanden, and D. C. Schram, Mater. Res. Soc. Symp. Proc. 557, 25 (1999).
11. A. de Graaf, G. Dinescu, J. L. Longueville, M. C. M. van de Sanden, D. C. Schram, E. H. A. Dekempeneer, and L. J. van Ijzendoorn, Thin Solid Films 333, 29 (1998).
12. J. W. A. M. Gielen, M. C. M. van de Sanden, P. R. M. Kleuskens, and D. C. Schram, Plasma Sources Sci. Technol. 5, 492 (1996).
13. M. F. A. M. van Hest, B. Mitu, D. C. Schram, and M. C. M. van de Sanden (unpublished).
14. R. Raghavan and P. W. Morrison, Jr., J. Quant. Spectrosc. Radiat. Transf. 69, 605 (2001).
15. A. T. M. Wilbers, G. M. W. Kroesen, C. J. Timmermans, and D. C. Schram, Meas. Sci. Technol. 1, 1326 (1990).
16. A. T. M. Wilbers, G. M. W. Kroesen, C. J. Timmermans, and D. C. Schram, J. Quant. Spectrosc. Radiat. Transf. 45, 1 (1991).
17. J. T. Houghton and S. D. Smith, Infrared Physics (Oxford University Press, Oxford, 1966).
18. F. L. Pedrotti and L. S. Pedrotti, Introduction to Optics (Prentice-Hall, Englewood Cliffs, NJ, 1993).
19. C. Palmer, Diffraction Grating Handbook, Richardson Grating Laboratory, Rochester NY (2000).
20. S. P. Davis, Diffraction Grating Spectrographs (Holt, Rinehart, and Winston, New York, 1970).
21. Spectrometric Techniques IV, edited by G. A. Vanasse (Academic, New York, 1985).
22. M. M. Hemerik, Ph.D. thesis, Eindhoven University of Technology, Eindhoven, The Netherlands, 2001.
23. Y. Segui and P. Raynaud, NATO ASI Ser., Ser. C 346, 81 (1997).
24. M. C. Hutley, Diffraction Gratings (Academic, London, 1982).
25. J. W. A. M. Gielen, W. M. M. Kessels, M. C. M. van de Sanden, and D. C. Schram, J. Appl. Phys. 82, 2643 (1997).
26. A. de Graaf, Ph.D. thesis, Eindhoven University of Technology, Eindhoven, The Netherlands, 2000.
27. N. J. Harrick, Phys. Rev. Lett. 4, 224 (1960).
28. E. S. Aydil, R. A. Gottscho, and Y. J. Chabal, Pure Appl. Chem. 66, 1381 (1994).
29. M. F. A. M. van Hest, Ph.D. thesis, Eindhoven University of Technology, Eindhoven, The Netherlands, 2002.
30. H. G. Pryce Lewis, T. B. Casserly, and K. K. Gleason, J. Electrochem. Soc. 148, F212 (2001).
31. D. Magni, Ch. Deschenaux, Ch. Hollenstein, A. Creatore, and P. Fayet, J. Phys. D 34, 87 (2001).