SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 2, 1988, Pages 153-167

A piezoelectric micropump based on micromachining of silicon

Author keywords

[No Author keywords available]

Indexed keywords

PUMPS, RECIPROCATING; SEMICONDUCTING SILICON - MACHINING;

MICROMACHINING; PIEZOELECTRIC DISK; PIEZOELECTRIC MICROPUMP; PUMP CHAMBERS; RECIPROCATING DISPLACEMENT; SILICON WAFER;

PIEZOELECTRIC DEVICES;

EID: 0024101674 PISSN: 02506874 EISSN: None Source Type: Journal
DOI: 10.1016/0250-6874(88)87005-7 Document Type: Article

Times cited : (550)

References (9)

1
- 0020127035
- Silicon as a mechanical material
- (1982) Proc. IEEE , vol.70 , pp. 420-457
- Petersen¹

2
- 84915883188
- J.G. Smits, Piezoelectric micropump for peristaltic fluid displacements, NL patent 8302860 (1985).

3
- 0003491390
- 2nd edn., McGraw-Hill, New York
- (1950) Theory of Plates and Shells , pp. 51-72
- Timoshenko¹ Woinowsky-Krieger²

4
- 0003491390
- 2nd edn., McGraw-Hill, New York
- (1950) Theory of Plates and Shells , pp. 364-377
- Timoshenko¹ Woinowsky-Krieger²

5
- 36849141789
- Young's modulus, shear modulus, and Poisson's ratio in silicon and germanium
- (1965) J. Appl. Phys. , vol.36 , pp. 153-156
- Wortman¹ Evans²

6
- 84915883187
- Geintegreerde Si/ZnO actuator voor micropomp
- University of Twente, Enschede, The Netherlands
- (1984) Master's Thesis, 060.0210
- Mulder¹

7
- 84915835379
- Chemical etching of silicon for micromechanical devices
- Proc. 3rd Sensors and Actuators Symp. The Netherlands , pp. 199-209
- Bouwstra¹ Lammerink²

8
- 0014563672
- Field assisted glass-metal sealing
- (1969) J. Appl. Phys. , vol.40 , pp. 3946-3949
- Wallis¹ Pomerantz²

9
- 0001525820
- Low energy metal-glass bonding
- (1969) Journal of Applied Physics , vol.40 , pp. 5396-5397
- De Nee¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.