Designing high-performance micro-pumps based on no-moving-parts valves

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 62, Issue , 1997, Pages 47-53

  Bardell, Ron L ^a   Sharma, Nigel R ^b   Forster, Fred K ^a   Afromowitz, Martin A ^b   Penney, Robert J ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

^b University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MACHINE DESIGN; MATHEMATICAL MODELS; PUMPS; VALVES (MECHANICAL);

MICROPUMPS; NO MOVING PARTS VALVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031344958     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)

1. Forster, F., Bardell, R., Afromowitz, M., Sharma, N., 1995, "Design, Fabrication and Testing of Fixed-Valve Micropumps," Proceedings of the ASME Fluids Engineering Division, 1995 IMECE, Vol.234, pp. 39-44.
2. Gerlach, T. and Wurmus, H., 1995, "Working Principle and Performance of the Dynamic Micropump," Sensors and Actuators A (Physical), Vol.50, no.1-2, pp. 135-140.
3. Olsson, A., Enoksson, P., Stemme, G. and Stemme, E., 1995a, "A Valve-Less Planar Pump in Silicon," The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Stockholm, June 25-29 , pp. 291-294.
4. Olsson, A., Stemme, G. and Stemme, E., 1995b, "A Valve-Less Planar Fluid Pump With Two Pump Chambers," Sensors and Actuators A (Physical), Vol.46-47, pp. 549-556.
5. Olsson, A., Enoksson, P., Stemme, G. and Stemme, E., 1996, "An Improved Valve-Less Pump Fabricated Using Deep Reactive Ion Etching," Proceedings of the IEEE, Ninth International Workshop on MEMS, pp. 479-484.
6. th edition, McGraw-Hill, New York, p.332.