Decay of pyramidal nano-island formed on Si(1 0 0) studied by kinetic Monte Carlo simulation

Surface Science

Volumn 514, Issue 1-3, 2002, Pages 60-67

  Kawamura, T ^a   Toyoshima, S ^a   Ichimiya, A ^b  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Monte Carlo simulations; Silicon; Surface diffusion; Surface structure, morphology, roughness, and topography

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; MONTE CARLO METHODS; MORPHOLOGY; SILICON; SURFACE PHENOMENA; SURFACE ROUGHNESS;

SURFACE DIFFUSION;

SURFACE STRUCTURE;

EID: 0037055572     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)01608-4     Document Type: Conference Paper

References (8)