Development of polyimide-based flexible tactile sensing skin

Materials Research Society Symposium - Proceedings

Volumn 736, Issue , 2002, Pages 165-170

  Engel, Jonathan ^a   Chen, Jack ^a   Liu, Chang ^a   Flachsbart, Bruce R ^b   Selby, John C ^b   Shannon, Mark A ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; SCANNING ELECTRON MICROSCOPY; SENSORS; THIN FILMS;

TACTILE SENSING SKIN;

POLYIMIDES;

EID: 0038204698     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-736-d4.5     Document Type: Conference Paper

References (13)

1. M.H. Lee and H.R. Nicholls, "Tactile sensing for mechatronics - a state of the art survey" Mechatronics 9 1-33 (1999).
2. B.J. Kane, M.R. Cutkosky, T.A. Kovacs, "A traction stress sensor array for use in high-resolution robotic tactile imaging" JMEMS 9 425-434 (2000).
3. D.J. Beebe, A.S. Hsieh, D.D. Denton and R.G. Radwin, "A silicon force sensor for robotics and medicine" Sensors and Actuators A 50 55-56 (1995).
4. B.L. Gray and R.S. Fearing, "A surface micromachined microtactile sensor array" Proc 1996 IEEE Int'l Conf. On Robotics and Automation (Minneapolis, MN) 1-6 (1996).
5. M. Leineweber, G. Pelz, M. Schmidt, H. Kappert, G. Zimmer, "New tactile sensor chip with silicone rubber cover" Sensors and Actuators A 84 236-245 (2000).
6. E.S. Kolesar and C.S. Dyson, "Object imaging with a piezoelectric robotic tactile sensor" JMEMS 4 87-96 (1995).
7. R.R. Reston and E.S. Kolesar, "Robotic tactile sensor array fabricated from a piezoelectric polyvinylidene fluoride film" Proc. 1990 IEEE NAECON 3 1139-114 (1990).
8. F. Jiang, Y-C. Tai, K. Walsh, T. Tsao, G-B. Lee, C-M. Ho, "A flexible MEMS technology and its first application to shear stress sensor skin" Proc 1997 IEEE Int'l Conf. On MEMS 465-470 (1997).
9. D.J. Beebe and D.D. Denton, "A flexible polyimide-based package for silicon sensors" Sensors and Actuators A 44 57-64 (1994).
10. L. Cao, T.S. Kim, J. Zhou, S.C. Mantell, D.L. Polla, "Calibration technique for MEMS membrane type strain sensors" Proc. 1999 IEEE Symposium on Microelectronics 204-210 (1999).
11. T. Shimizu, M. Shikida, K. Sato, K. Itoigawa, "A new type of tactile sensor detecting contact force and hardness of an object" 2002 Proc 2002 IEEE Conf. On MEMS 1 344-347 (2002).
12. Y. Nakamura, Y. Suzuki, Y. Watanabe, "Effect of oxygen plasma etching on adhesion between polyimide films and metal" Thin Solid Films 290-291 367-369 (1996).
13. M.D. Caterer, T.H. Daubenspeck, T.G. Ference, S.J. Holmes, R.M. Quinn, "Processing thick multilevel polyimide films for 3-D stacked memory" IEEE Transactions on Advanced Packaging 22 189-199 (1999).