Dynamic MEMS devices for multi-axial fatigue and elastic modulus measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 63-74

  White, C D ^a   Xu, R ^a   Sun, X ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Elastic modulus; Fatigue; Microelectromechanical systems (MEMS); Microscale material characterization; Polysilicon; Resonator

Indexed keywords

CHARACTERIZATION; ELASTIC MODULI; FATIGUE OF MATERIALS; POLYSILICON; RESONATORS;

MULTI-AXIAL FATIGUE;

MICROELECTROMECHANICAL DEVICES;

EID: 0038058957     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476332     Document Type: Conference Paper

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