Submicron ferroelectric elements fabricated by direct electron beam lithography

Materials Research Society Symposium - Proceedings

Volumn 748, Issue , 2003, Pages 43-48

  Kim, Dong Joo ^a   Im, Jin Seo ^a   Thompson, Carol ^a,b   Streiffer, S K ^a   Wiederrecht, G ^a   Auciello, O ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b NORTHERN ILLINOIS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DATA STORAGE EQUIPMENT; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; FABRICATION; FERROELECTRIC THIN FILMS;

FERROELECTRIC CAPACITORS;

FERROELECTRIC MATERIALS;

EID: 0038037165     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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