Growth structure of yttria-stabilized-zirconia films during off-normal ion-beam-assisted deposition

Journal of Materials Research

Volumn 13, Issue 11, 1998, Pages 3106-3113

  Iijima, Y ^a   Hosaka, M ^a   Tanabe, N ^a   Sadakata, N ^a   Saitoh, T ^a   Kohno, O ^a   Takeda, K ^b  

^a FUJIKURA LTD   (Japan)

^b Super GM   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; CRYSTALLIZATION; DEPOSITION; FILM GROWTH; ION BEAMS; MATHEMATICAL MODELS; NUMERICAL METHODS; TEXTURES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALIGNMENT MECHANISM; COLUMNAR STRUCTURES; EPITAXIAL CRYSTALLIZATION; ETCHING RATE MEASUREMENT; ION BEAM ASSISTED DEPOSITION; SELECTIVE GROWTH MODEL; YTTRIA-STABILIZED ZIRCONIA;

ZIRCONIA;

EID: 0032205742     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0423     Document Type: Article

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