Thermal microactuator characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 1046-1055

  Jonsmann, Jacques ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; ELECTRIC LOSSES; IMAGE ANALYSIS; IMAGE QUALITY;

THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 0032665857     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341175     Document Type: Conference Paper

References (4)