Microrobots and micromechanical systems

Sensors and Actuators

Volumn 19, Issue 3, 1989, Pages 267-287

  Trimmer, W S N ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ROBOTS, INDUSTRIAL;

MICROMECHANICAL SYSTEMS; MICROROBOTS;

MECHANISMS;

EID: 0024732785     PISSN: 02506874     EISSN: None     Source Type: Journal    
DOI: 10.1016/0250-6874(89)87079-9     Document Type: Article

References (41)

1. Micro gears and turbines etched from silicon
2. Deep narrow vertical-walled shafts in (110) silicon
3. Ink jet printing nozzle arrays etched in silicon
4. Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon
5. Anisotropic etching of silicon
6. Fabrication of microstructures using the LIGA process
7. Integrated movable micromechanical structures for sensors and actuators
8. Micro-Structures
9. A micromachined manipulator for submicron positioning of optical fibers
10. Electromechanical devices utilizing thin silicon diaphragms
11. Fine-grained polysilicon films with built-in tensile strain
12. Polycrystalline silicon micromechanical beams
13. The use of micromachined structures for the measurement of mechanical properties and adhesion of thin films
14. Integrated fabrication of polysilicon mechanisms
15. Silicon as a mechanical material
16. Fabrication of an integrated planar silicon ink-jet structure
17. Micromechanical light modulator array fabricated on silicon
18. Solid-State process to produce hemispherical components for inertial fusion targets
19. Pin joints, gears, springs, cranks, and other novel micromechanical structures
20. Micro gears and turbines etched from silicon
21. The principle of an electrostatic linear actuator manufactured by silicon micromachining
22. The fabrication of an electrostatic linear actuator by silicon micromachining
23. The fabrication of integrated mass flow controllers
24. Electrostatic micromotors: electromechanical characteristics
25. The modelling of electrostatic forces in small electrostatic actuators
26. Thermally excited silicon microactuators
27. Silicon electrostatic motors
28. Design considerations for a practical electrostatic micro motor
29. SCOFFS: a small cantilevered optical fiber servo system
30. A microminiature electric-to-fluidic valve
31. 2 and PSG
32. A robot hand with elastic fingers and its application to assembly processes
33. The UTAH/M.I.T. dextrous hand: work in progress
34. Hatachi's robot hand