Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4936, Issue , 2002, Pages 215-224

  Tsaur, Jiunnjye ^a   Wang, Zhan Jie ^b   Zhang, Lulu ^a   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a   Suga, Tadatomo ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Laser ablation; Microscanner; PZT; SOI wafer; Sol gel

Indexed keywords

LASER ABLATION; MICROSTRUCTURE; PEROVSKITE; RESIDUAL STRESSES; SILICON WAFERS; SOL-GELS;

MICROSCANNERS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0037741805     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.469675     Document Type: Conference Paper

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