Active-matrix addressed micromirror array for wavefront correction in adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 265-275

  Gehner, Andreas ^a   Doleschal, Wolfgang ^a   Elgner, Andreas ^a   Kauert, Reinhard ^a   Kunze, Detlef ^a   Wildenhain, Michael ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Active matrix addressing; Adaptive optics; Finite element analysis; Micromirror array; MOEMS; Piston type mirrors; Spatial light modulator; Surface micromachining; Wavefront correction

Indexed keywords

ABERRATIONS; ADAPTIVE OPTICS; ALUMINUM; CHEMICAL MECHANICAL POLISHING; CMOS INTEGRATED CIRCUITS; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; INTERFEROMETRY; LIGHT MODULATORS; MICROMACHINING; WAVEFRONTS;

MICROMIRRORS; WAVEFRONT CORRECTION;

MIRRORS;

EID: 0035763855     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443095     Document Type: Article

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