Polysilicon surface micro-machined spatial light modulator with novel electronic integration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 477-484

  Dimas, Clara ^a   Bifano, Thomas ^b   Bierden, Paul ^a   Perreault, Julie ^b   Krulevitch, Peter ^c   Roehnelt, Ryan ^d   Cornelissen, Steven ^b  

^a BOSTON MICROMACHINES CORPORATION   (United States)

^b Boston University   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^d MicroAssembly Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT MODULATORS; MICROMACHINING; MIRRORS; OPTOELECTRONIC DEVICES; POLYSILICON; THIN FILMS;

SPATIAL LIGHT MODULATORS (SLM);

MICROELECTROMECHANICAL DEVICES;

EID: 6444245067     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.462846     Document Type: Article

References (9)

1. Elimination of stressinduced curvature in thin-film structures
2. Resonant frequency calculation for a segmented mirror
3. An efficient electrical addressing method using through-wafer vias for two-dimensional ultrasonic arrays
4. Packaging and electronics for MEMS-based AO
5. Statistical performance evaluation of electrostatic micro actuators for a deformable mirror
6. Manufacturing of an optical quality mirror system for adaptive optics
7. Flexible, dry-released process for aluminum electrostatic actuators
8. Adaptive optics systems with micromachined mirror array and stochastic gradient descent controller