Development of advanced micromirror arrays by flip-chip assembly

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 102-113

  Michalicek, M Adrian ^a   Bright, Victor M ^a  

^a UCB 450   (United States)

Author keywords

Assembly; Bonding; Cantilever; Flip Chip; MEMS; Micromirrors; MOEMS; MUMPs; Piston; Torsion

Indexed keywords

CMOS INTEGRATED CIRCUITS; FLIP CHIP DEVICES; MICROELECTROMECHANICAL DEVICES; PISTONS;

FLIP-CHIP ASSEMBLY;

MIRRORS;

EID: 0035763780     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.443105     Document Type: Conference Paper

References (10)

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2. M.A. Michalicek, W. Zhang, K.F. Harsh, V.M. Bright, and Y.C. Lee, "Micromirror Arrays Fabricated by Flip-Chip Assembly," SPIE vol. 3878, pp. 68-79, 1999.
3. R.S. Irwin, W. Zhang, K.F. Harsh, and Y.C. Lee, "Quick Prototyping of Flip-Chip Assembly with MEMS," Proc. ISA 44th International Instrumentation Symposium, pp. 256-263, 1998.
4. M.A. Michalicek and V.M. Bright, "Flip-chip fabrication of advanced micromirror arrays," IEEE MEMS, pp. 313-316, 2001.
5. M.A. Michalicek, J.H. Comtois, and H.K. Schriner, "Development of Advanced Second-Generation Micromirror Devices Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process," SPIE vol. 3292, pp. 71-80, 1998.
6. M.A. Michalicek, J.H. Comtois, and H.K. Schriner, "Geometry versus optical performance of micromirrors and arrays," SPIE vol. 3440, pp. 140-147, 1998.
7. M.A. Michalicek, D.E. Sene and V.M. Bright, "Advanced Modeling of Micromirror Devices," Proc. International Conference on Micro/Nanotechnology for Space Applications, NASA & Aerospace Press, pp. 214-229, 1995.
8. J.H. Comtois, V.M. Bright, S.C. Gustafson, and M.A. Michalicek, "Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators," SPIE vol. 2641, pp. 76-87, 1995.
9. M.A. Michalicek, V.M. Bright, and J.H. Comtois, "Design, Fabrication, Modeling, and Testing of a Surface-Micromachined Micromirror Device," Proc. ASME Dynamic Systems and Controls vol. DSC 57-2, pp. 981-988, 1995.
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