Investigation of the deposition and integration of hard coatings for moving MEMS applications

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 123-128

  Adams, P M ^a   Robertson, R E ^a   Cole, R C ^a   Hinkley, D ^a   Radhakrishnan, G ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; INTELLIGENT CONTROL; POLYSILICON; PULSED LASER DEPOSITION; SATELLITES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; TITANIUM CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS; X RAY DIFFRACTION ANALYSIS;

HARD COATINGS; SLIDING SURFACE CONTACT; WEAR RESISTANT COATINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034498186     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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