Transmission electron microscopy study of the structure of radio frequency sputter-deposited yttria-stabilized zirconia thin films

Journal of Materials Research

Volumn 18, Issue 1, 2003, Pages 195-200

  Ruddell, David E ^a   Stoner, Brian R ^a,b   Thompson, Jeffrey Y ^a  

^a UNIVERSITY OF NORTH CAROLINA   (United States)

^b MCNC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; MULTILAYERS; OXYGEN; SPUTTER DEPOSITION; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; ZIRCONIA;

MULTILAYERED STRUCTURES;

THIN FILMS;

EID: 0037669494     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0027     Document Type: Article

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