The relation between the plasma characteristic and the corrosion properties of TiN/Ti multilayers deposited by unbalanced magnetron sputtering

Thin Solid Films

Volumn 433, Issue 1-2 SPEC., 2003, Pages 217-223

  Flores, M ^a   Muhl, S ^a   Andrade, E ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Corrosion resistance; Magnetron sputtering; TiN Ti multilayers

Indexed keywords

CORROSION RESISTANCE; ION BEAMS; ION BOMBARDMENT; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; PLASMA DENSITY; TITANIUM NITRIDE;

ELECTROMAGNETIC COILS;

MULTILAYERS;

EID: 0037505545     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00340-7     Document Type: Conference Paper

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