A facility for characterizing the dynamic mechanical behavior of thin membranes for microelectromechanical systems

Review of Scientific Instruments

Volumn 73, Issue 5, 2002, Pages 2067-

  Hall, J D ^a   Apperson, N E ^a   Crozier, B T ^a   Xu, C ^a   Richards, R F ^a   Bahr, D F ^a   Richards, C D ^a  

^a Washington State University   (United States)

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EID: 0036574865     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1470227     Document Type: Article

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