Characterizing deflectable microstructures via a high-resolution laser-based measurement system

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 12-17

  Honer, Kenneth A ^a   Maluf, Nadim I ^a   Martinez, Edwardo ^a   Kovacs, Gregory T A ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Control; Deflection; Lifetime; Microstructures; Optical sensors; Process; Variation

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; FREQUENCY RESPONSE; LASER APPLICATIONS; NATURAL FREQUENCIES; NONDESTRUCTIVE EXAMINATION; OPTICAL SENSORS; SPATIAL VARIABLES MEASUREMENT;

DEFLECTABLE MICROSTRUCTURES; LASER BASED MEASUREMENT SYSTEMS; MICROMECHANICAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030100387     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80119-1     Document Type: Article

References (6)

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