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Volumn 12, Issue 3, 2001, Pages 320-326

Measurement of a microphone membrane deflection profile using an optical fibre and wedge fringe projection

Author keywords

Fringe projection; Microphone; Non destruction testing; Optical fibre; Optical wedge; Phase shifting technique

Indexed keywords

DEFORMATION;

EID: 0035281571     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/12/3/311     Document Type: Article
Times cited : (9)

References (23)
  • 11
    • 78951487764 scopus 로고    scopus 로고
    • Polarization based fringe projection interferometer for phase stepping techniques
    • (1996) Proc. SPIE , vol.2782 , pp. 250-257
    • Piotr, S.K.1
  • 17
    • 0028447327 scopus 로고
    • Capacitive microphone with a surface micromachined backplate using electroplating technology
    • (1994) J. MEMS , vol.3 , pp. 69-75
    • Bergqvist, J.1    Gobet, J.2
  • 20
    • 84975624647 scopus 로고
    • Phase-shifting speckle interferometry
    • (1985) Appl. Opt , vol.24 , pp. 3053-3058
    • Creath, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.