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Materials Transactions, JIM

Volumn 40, Issue 3, 1999, Pages 209-213

Effect of oxygen gas addition on preparation of iridium and platinum films by metal-organic chemical vapor deposition

(3) Goto, Takashi a Vargas, J Roberto a,b,c Hirai, Toshio a

a TOHOKU UNIVERSITY (Japan)

b TOHOKU UNIVERSITY (Japan)

c INSTITUTO POLITÉCNICO NACIONAL (Mexico)

Author keywords

Epitaxial growth; Indium film; Metal organic chemical vapor deposition; Oxygen gas addition; Platinum film

Indexed keywords

EID: 28044443998 PISSN: 09161821 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans1989.40.209 Document Type: Article

Times cited : (13)

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