메뉴 건너뛰기




Volumn 90, Issue 7, 2003, Pages

Mechanisms of diffusion of boron impurities in SiO2

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ATOMIC PHYSICS; BORON; CALCULATIONS; CHEMICAL BONDS; DIFFUSION; IMPURITIES; REACTION KINETICS;

EID: 0037458408     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (20)

References (37)
  • 17
    • 0012651633 scopus 로고    scopus 로고
    • (Institute of Electrical and Electronics Engineers, Piscataway, NJ)
    • Successful fabrication of 1.3-nm gate oxides is recently reported: G. Timp et al., IDEM Technical Digest (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1997), p. 930
    • (1997) IDEM Technical Digest , pp. 930
    • Timp, G.1
  • 19
    • 0031078539 scopus 로고    scopus 로고
    • 2 is proposed by compiling thermochemical data: R.B. Fair, J. Electrochem. Soc. 144, 708 (1997).
    • (1997) J. Electrochem. Soc. , vol.144 , pp. 708
    • Fair, R.B.1
  • 20
    • 0009685729 scopus 로고    scopus 로고
    • 2 is examined by density-functional calculations: D. R. Hamann, Phys. Rev. Lett. 81, 3447, (1998)
    • (1998) Phys. Rev. Lett. , vol.81 , pp. 3447
    • Hamann, D.R.1
  • 27
    • 0012650116 scopus 로고    scopus 로고
    • note
    • The inclusion of spin degree of freedom is important: The total-energy gain due to spin polarization is typically 0.2-0.5 eV, and the spin splittings of Kohn-Sham levels ae 1.5-2.0 eV.
  • 30
    • 0012664082 scopus 로고    scopus 로고
    • note
    • 2.
  • 31
    • 0012724457 scopus 로고    scopus 로고
    • note
    • The convergence of the calculational parameters are examined by using the cutoff energies of 25, 49, and 64 Ry, and the Γ point and the 8 k point samplings in BZ. The calculated total-energy differences are found to converge within 0.02 eV.
  • 34
    • 0003998388 scopus 로고    scopus 로고
    • edited by D. R. Lide (CRC Press, Florida); 81st ed.
    • CRC Handbook of Chemistry and Physics, edited by D. R. Lide (CRC Press, Florida, 2000), 81st ed.
    • (2001) CRC Handbook of Chemistry and Physics
  • 36
    • 0012692772 scopus 로고    scopus 로고
    • note
    • The final geometry is one of nearby most stable geometries from which B repeat the process to diffuse in the long distance. In the case of α-quartz, the final geometry is obtained from the starting geometry by a threehold rotation followed by a 2c/3 nonprimitive translation.
  • 37
    • 0032638838 scopus 로고    scopus 로고
    • note
    • The experimental barrier for the B diffusion scatters between 2-3 eV. T. Aoyama, H. Tashiro, and K. Suzuki, J. Electrochem. Soc. 146, 1879 (1999). and references therein.
    • (1999) J. Electrochem. Soc. , vol.146 , pp. 1879
    • Aoyama, T.1    Tashiro, H.2    Suzuki, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.