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1
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0004180475
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edited by G. E. Murch and A. S. Nowick (Academic, New York)
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W. Frank, U. Gösele, H. Mehrer, and A. Seeger, in Diffusion in Crystalline Solids, edited by G. E. Murch and A. S. Nowick (Academic, New York, 1984).
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Diffusion in Crystalline Solids
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Frank, W.1
Gösele, U.2
Mehrer, H.3
Seeger, A.4
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3
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0001521332
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R. Car, P. J. Kelly, A. Oshiyama, and S. T. Pantelides, Phys. Rev. Lett. 52, 1814 (1984)
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(1984)
Phys. Rev. Lett.
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Car, R.1
Kelly, P.J.2
Oshiyama, A.3
Pantelides, S.T.4
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17
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0012651633
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(Institute of Electrical and Electronics Engineers, Piscataway, NJ)
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Successful fabrication of 1.3-nm gate oxides is recently reported: G. Timp et al., IDEM Technical Digest (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1997), p. 930
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(1997)
IDEM Technical Digest
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Timp, G.1
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19
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0031078539
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2 is proposed by compiling thermochemical data: R.B. Fair, J. Electrochem. Soc. 144, 708 (1997).
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(1997)
J. Electrochem. Soc.
, vol.144
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Fair, R.B.1
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20
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0009685729
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2 is examined by density-functional calculations: D. R. Hamann, Phys. Rev. Lett. 81, 3447, (1998)
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(1998)
Phys. Rev. Lett.
, vol.81
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Hamann, D.R.1
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24
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0000873095
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Codes used in the present work are based on Tokyo Ab initio Program Package (TAPP) developed by us; see J. Yamauchi, M. Tsukada, S Watanabe, and O. Sugino, Phys. Rev. B 54, 5586 (1996)
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(1996)
Phys. Rev. B
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, pp. 5586
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Yamauchi, J.1
Tsukada, M.2
Watanabe, S.3
Sugino, O.4
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27
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0012650116
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note
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The inclusion of spin degree of freedom is important: The total-energy gain due to spin polarization is typically 0.2-0.5 eV, and the spin splittings of Kohn-Sham levels ae 1.5-2.0 eV.
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30
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0012664082
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note
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2.
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31
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0012724457
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note
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The convergence of the calculational parameters are examined by using the cutoff energies of 25, 49, and 64 Ry, and the Γ point and the 8 k point samplings in BZ. The calculated total-energy differences are found to converge within 0.02 eV.
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34
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0003998388
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edited by D. R. Lide (CRC Press, Florida); 81st ed.
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CRC Handbook of Chemistry and Physics, edited by D. R. Lide (CRC Press, Florida, 2000), 81st ed.
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(2001)
CRC Handbook of Chemistry and Physics
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36
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0012692772
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note
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The final geometry is one of nearby most stable geometries from which B repeat the process to diffuse in the long distance. In the case of α-quartz, the final geometry is obtained from the starting geometry by a threehold rotation followed by a 2c/3 nonprimitive translation.
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37
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0032638838
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note
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The experimental barrier for the B diffusion scatters between 2-3 eV. T. Aoyama, H. Tashiro, and K. Suzuki, J. Electrochem. Soc. 146, 1879 (1999). and references therein.
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(1999)
J. Electrochem. Soc.
, vol.146
, pp. 1879
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Aoyama, T.1
Tashiro, H.2
Suzuki, K.3
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