Determining the Poisson's ratio of thin film materials using resonant method

Sensors and Actuators, A: Physical

Volumn 103, Issue 3, 2003, Pages 377-383

  Tsai, Hsin Chang ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

(1 1 1) substrate; Bending and torsional vibration modes; Cantilever beams; Poisson's ratio; Thin film materials

Indexed keywords

CANTILEVER BEAMS; MICROMACHINING; POISSON RATIO; RESONANCE; SILICA; SUBSTRATES; VIBRATIONS (MECHANICAL);

RESONANT METHODS;

THIN FILMS;

EID: 0037442545     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00400-4     Document Type: Article

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