Micromachined strain sensor with differential capacitive readout

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 552-557

  Que, L ^a   Li, M H ^a   Chu, L L ^a   Gianchandani, Y B ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELASTIC MODULI; MICROMACHINING; MONOLAYERS; NICKEL; POLYCRYSTALLINE MATERIALS; READOUT SYSTEMS; RESIDUAL STRESSES; SEMICONDUCTING SILICON; STRAIN GAGES;

MICROMACHINED STRAIN SENSORS;

MICROSENSORS;

EID: 0032679347     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)