Novel titanium compounds for metal-organic chemical vapor deposition of titanium dioxide films with an ultrahigh deposition rate

Inorganic Chemistry

Volumn 42, Issue 7, 2003, Pages 2378-2383

  Woo, Kyoungja ^a   Lee, Wan In ^b   Lee, Jong Seung ^b   Kang, Sang Ook ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b Inha University   (South Korea)

^c Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

METAL COMPLEX; ORGANIC COMPOUND; TETRAHYDROFURAN; TITANIUM DERIVATIVE; TITANIUM DIOXIDE; TOLUENE;

ARTICLE; CARBON NUCLEAR MAGNETIC RESONANCE; CRYSTAL STRUCTURE; EVAPORATION; INFRARED RADIATION; PROTON NUCLEAR MAGNETIC RESONANCE; SYNTHESIS; THERMOSTABILITY; VAPOR; VAPORIZATION; X RAY CRYSTALLOGRAPHY;

EID: 0037425147     PISSN: 00201669     EISSN: None     Source Type: Journal    
DOI: 10.1021/ic0256967     Document Type: Article

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