Metalorganic chemical vapor deposition of barium strontium titanate thin films with a more coordinatively saturated Ti precursor, Ti(dmae)4dmae=dimethy(aminoethoxide)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 3033-3037

  Lee, Jung Hyun ^a   Kim, Joo Young ^a   Shim, Jae Young ^b   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Nano Tera Materials Incorporated   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033469430     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582001     Document Type: Article

References (11)

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