Improvement in Integration Issues for Organic Low-k Hybrid-Organic-Siloxane-Polymer

Journal of the Electrochemical Society

Volumn 148, Issue 2, 2001, Pages

  Liu, Po Tsun ^a   Chang, Ting Chang ^a   Su, Hsing ^b   Mor, Yi Shian ^b   Yang, Ya Liang ^b   Chung, Henry ^b   Hou, Jan ^b   Sze, Simon M ^a  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001891370     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1342184     Document Type: Article

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