An analytic Volterra-series-based model for a MEMS variable capacitor

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Volumn 22, Issue 2, 2003, Pages 124-131

  Innocent, Manuel ^a,b   Wambacq, Piet ^a   Donnay, Stéphane ^a   Tilmans, Harrie A C ^a   Sansen, Willy ^b   De Man, Hugo ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Behavioral model; Microelectromechanical systems (MEMS); Nonlinear; Variable capacitor; Varicap; Volterra series

Indexed keywords

CAPACITORS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTRIC FILTERS; EQUATIONS OF MOTION; FOURIER TRANSFORMS; INTEGRATED CIRCUIT LAYOUT; LAPLACE TRANSFORMS; NONLINEAR EQUATIONS; VARIABLE FREQUENCY OSCILLATORS;

HARMONIC BALANCE ANALYSIS; MASS-SPRING-DAMPER SYSTEM; MICROELECTROMECHANICAL VARIABLE CAPACITOR; VARIABLE CAPACITOR; VOLTERRA-SERIES MODEL;

MICROELECTROMECHANICAL DEVICES;

EID: 0037322156     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAD.2002.806603     Document Type: Article

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