Arrays of Ge islands on Si(001) grown by means of electron-beam pre-patterning

Nanotechnology

Volumn 14, Issue 2, 2003, Pages 264-267

  Borgstrom M ^a   Zela, V ^a   Seifert, W ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM PUMPING; ELECTRON TUNNELING; MASKS; NUCLEATION; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH;

DOT-DOT TUNNELLING; ELECTRON BEAM PRE-PATTERNING; SELF-ASSEMBLED GERMANIUM DOTS;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0037294527     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/14/2/331     Document Type: Article

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