Control of surface morphology through variation of growth rate in SiGe/Si(100) epitaxial films: Nucleation of "quantum fortresses"

Applied Physics Letters

Volumn 81, Issue 13, 2002, Pages 2445-2447

  Gray, Jennifer L ^a   Hull, Robert ^a   Floro, Jerrold A ^b  

^a University of Virginia   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POTENTIAL APPLICATIONS; PYRAMIDAL PITS; QUANTUM CELLULAR AUTOMATA; QUANTUM FORTRESS; SIGE/SI;

CELLULAR AUTOMATA; EPITAXIAL FILMS; EPITAXIAL GROWTH; GERMANIUM; GROWTH RATE; MORPHOLOGY;

SURFACE MORPHOLOGY;

EID: 79956057962     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1509094     Document Type: Article

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