In-situ determination of interface roughness in MOVPE-grown visible VCSELs by reflectance spectroscopy

Journal of Crystal Growth

Volumn 248, Issue SUPPL., 2003, Pages 194-200

  Haberland, K ^a,b   Zorn, M ^c   Klein, A ^c   Bhattacharya, A ^c,d   Weyers, M ^c   Zettler, J T ^b   Richter, W ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b LayTec GmbH   (Germany)

^c LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

^d TATA INSTITUTE OF FUNDAMENTAL RESEARCH   (India)

Author keywords

A1. In situ monitoring; A1. Surface and interface roughness A3. Metalorganic vapor phase epitaxy; B3. Vertical cavity surface emitting lasers

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFACES (MATERIALS); LIGHT REFLECTION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR LASERS; SURFACE ROUGHNESS;

INTERFACE ROUGHNESS;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0037291357     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01816-X     Document Type: Conference Paper

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