Phase shifting focused ion beam moiré method

Review of Scientific Instruments

Volumn 74, Issue 1 I, 2003, Pages 256-259

  Xie, Huimin ^a   Shang, Haixia ^a   Li, Biao ^a   Dai, Fulong ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MICROMETERS; SCANNING ELECTRON MICROSCOPY;

THERMAL DEFORMATION;

PHASE SHIFT;

EID: 0037283127     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1525871     Document Type: Article

References (12)

1. W. N. Sharpe, Jr., Bin Yuan, and R. L. Edwards, J. Microelectromech. Syst. 6, 193 (1997).
2. M. W. Phaneuf, Micron 30, 277 (1999).
3. S. Reyntjens and R. Puers, J. Micromech. Microeng. 11, 287 (2001).
4. J. H. Daniel and D. F. Moore, Sens. Actuators A 73, 201 (1999).
5. J. Bragger, G. Beljakovic, M. Despont, N. F. de Rooij, and P. Vettiger, Microelectron. Eng. 35, 401 (1997).
6. S. Reyntjens and R. Puers, Proceedings Eurosensors XIV, Copenhagen, Denmark, 2000, p. 349.
7. S. Reyntjens and R. Puers, J. Micromech. Microeng. 10, 181 (2000).
8. B. Han, Exp. Mech. 38, 278 (1998).
9. S. Kishimoto, M. Egashira, and N. Shinya, Opt. Eng. 32, 522 (1993).
10. J. Degrieck, W. Van Paepegem, and P. Boone, Opt. Lasers Eng. 36, 29 (2001).
11. M. R. Miller, I. Mohammed, and P. S. Ho, Opt. Lasers Eng. 36, 127 (2001).
12. J. M. Huntely, J. Strain Anal. Eng. Des. 33, 105 (1998).