New technique for measuring Poisson's ratio of MEMS materials

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 185-190

  Sharpe Jr , W N ^a   Vaidyanathan, K R ^a   Yuan, Bin ^a   Edwards, R L ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FRICTION; INTERFEROMETRY; MICROMACHINING; SEMICONDUCTING SILICON; STRAIN MEASUREMENT; TENSILE TESTING;

BIAXIAL STRAIN; LASER BASED INTERFEROMETRY; POISSON RATIO; SURFACE MACHINED MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030643642     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)