Novel method to measure Poisson's ratio of thin films

Materials Research Society Symposium - Proceedings

Volumn 505, Issue , 1998, Pages 27-32

  Ziebart, V ^a   Paul, O ^a   Munch, U ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; MECHANICAL VARIABLES MEASUREMENT; POISSON RATIO; PRESSURE EFFECTS; PRESTRESSING; SILICON NITRIDE;

COMPRESSIVELY PRESTRESSED THIN FILMS;

THIN FILMS;

EID: 0031633288     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)