Laser-induced nano-patterning by means of interference subpatterns generated by microspheres

Applied Physics A: Materials Science and Processing

Volumn 76, Issue 1, 2003, Pages 1-3

  Denk, R ^a   Piglmayer, K ^a   Bauerle C ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER PULSES; POLYIMIDES; RADIATION; SILICA; SPHERES; SUBSTRATES;

EXCIMER LASER RADIATION; FULL WIDTH HALF MAXIMUM; INTERFERENCE SUBPATTERNS; LASER INDUCED NANOPATTERNING; MICROSPHERES; POLYIMIDE FOILS;

NANOTECHNOLOGY;

EID: 0037229486     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390201413     Document Type: Article

References (11)

1. D. Bäuerle: Laser Processing and Chemistry (Springer-Verlag, Berlin Heidelberg New York, 2000)
2. M.K. Herndon, R.T. Collins, R.E. Hollingsworth, P.R. Larson, M.B. Johnson: Appl. Phys. Lett. 74, 141 (1999)
3. S. Nolte, B.N. Chichkov, H. Welling, Y. Shani, K. Lieberman, H. Terkel: Opt. Lett. 24, 914 (1999)
4. G. Wysocki, S.T. Dai, T. Brandstetter, J. Heitz, D. Bäuerle: Appl. Phys. Lett. 79, 159 (2001)
5. J.D. Pedarnig, H. Göttlich, R. Rössler, W.M. Heckl, D. Bäuerle: Appl. Phys. A 67, 403 (1998)
6. R. Denk, K. Piglmayer, D. Bäuerle: Appl. Phys. A 74, 825 (2002)
7. K. Piglmayer, R. Denk, D. Bäuerle: Appl. Phys. Lett. 80, 4693 (2002)
8. F. Burmeister, W. Badowsky, T. Braun, S. Wieprich, J. Boneberg, P. Leiderer: Appl. Surf. Sci. 144-145, 461 (1999)
9. J.C. Hulteen, R.P. Van Duyne: J. Vac. Sci. Technol. A 13, 1553 (1995)
10. R. Micheletto, H. Fukuda, M. Ohtsu: Langmuir 11, 3333 (1995)
11. K. Piglmayer, E. Arenholz, C. Ortwein, D. Bäuerle: Appl. Phys. Lett. 73, 847 (1998)