Fabrication of a microevaporator equipped with a piezoelectrically-driven diaphragm pump

Journal of Chemical Engineering of Japan

Volumn 36, Issue 1, 2003, Pages 7-13

  Sotowa, Ken Ichiro ^a   Miyagawa, Daigo ^a   Zhao, Guibing ^a   Kusakabe, Katsuki ^a   Morooka, Shigeharu ^a   Takahashi, Koji ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Microevaporator; Micropump; Microreactor; Photolithography; Piezoelectric actuator

Indexed keywords

CHEMICAL REACTORS; EVAPORATORS; PIEZOELECTRIC DEVICES; PLATES (STRUCTURAL COMPONENTS); SILICON WAFERS; VISCOSITY;

MICROEVAPORATORS;

PUMPS;

CONSTRUCTION; DIAPHRAGM PUMP; EVAPORATOR; FABRICATION; PIEZOELECTRICITY;

EID: 0037226566     PISSN: 00219592     EISSN: None     Source Type: Journal    
DOI: 10.1252/jcej.36.7     Document Type: Article

References (38)

1. Acero, M. C., J. A. Plaza, J. Esteve, M. Carmona, S. Marco and J. Samitier; "Design of a Modular Micropump Based on Anodic Bonding," J. Micromech. Microeng., 7, 179-182 (1997)
2. Andersson, H., W. van der Wijngaart, P. Nilsson, P. Enoksson and G. Stemme; "A Valve-Less Diffuser Micropump for Microfluidic Analytical Systems," Sensors Actuators. B72, 259-265 (2001)
3. Browers, M. B. and I. Mudawar; "High Flux Boiling in Low Flow Rate, Low Pressure Drop Mini-Channel and Micro-Channel Heat Sinks," Int. J. Heat Mass Transfer, 27, 321-322 (1994)
4. Drost, M. K., C. Call, J. Cuta and R. Wegeng; "Microchannel Combustor/Evaporator Thermal Processes," Microscale Thermophys. Eng., 1, 321-332 (1997)
5. Ehrfeld, W., V. Hessel and H. Löwe: Microreactors, Wiley-VCH. Weinheim, Germany (2000)
6. Francais, O. and I. Dufour; "Dynamic Simulation of an Electrostatic Micropump with Pull-In and Hysteresis Phenomena." Sensors Actuators, A70, 56-60 (1998)
7. Guenat, O. T., D. Ghiglione, W. E. Morf and N. F. de Rooij; "Partial Electroosmotic Pumping in Complex Capillary Systems Part 2: Fabrication and Application of a Micro Total Analysis System (μTAS) Suited for Continuous Volumetric Nanotitrations," Sensors Actuators, B72, 273-282 (2001)
8. Jiang, X. N., Z. Y. Zhou, X. Y. Huang, Y. Li, Y. Yang and C. Y. Liu; "Micronozzle/Diffuser Flow and Its Application in Micro Valveless Pumps," Sensors Actuators, A70, 81-87 (1998)
9. Krishnan, M., V. Namasivayam, R. Lin, R. Pal and M. A. Burns; "Microfabricated Reaction and Separation Systems." Current Opinion Biotechnol., 12, 92-98 (2001)
10. Kusakabe, K., S. Morooka and H. Maeda; "Development of a Microchannel Catalytic Reactor System," Korean J. Chem. Eng., 18, 271-276 (2001a)
11. Kusakabe, K., D. Miyagawa, Y.-F. Gu, H. Maeda and S. Morooka; "Development of Self-Heating Microreactor for Catalytic Reactions." J. Chem. Eng. Japan, 34, 441-443 (2001b)
12. Kusakabe, K., M. Takahashi, H. Maeda and S. Morooka; "Preparation of Thin Palladium Membranes by a Novel Method Based on Photolithography and Electrolysis," J. Chem. Eng. Japan, 34, 703-705 (2001c)
13. Kusakabe, K., D. Miyagawa, Y.-F. Gu, H. Maeda and S. Morooka: "Development of a Self-Heating Catalytic Microreactor," Microreaction Technology (IMRET 5), M. Matlosz, W. Ehrfeld and J. P. Baselt, eds., pp.70-77. Springer, Berlin, Germany (2002)
14. Lee, M., Y. Y. Wong, M. Wong and Y. Zohar; "Size and Shape Effects on Two-Phase Flow Instabilities in Microchannels." Proceedings of MEMS 2002, IEEE, pp. 28-31, Las Vegas, USA (2002)
15. Lemoff, A. V. and A. P. Lee; "An AC Magnetohydrodynamic Micropump," Sensors Actuators. B63, 178-185 (2000)
16. Makino, E., T. Mitsuya and T. Shibata; "Micromachining of TiNi Shape Memory Thin Film for Fabrication of Micropump," Sensors Actuators, A79, 251-259 (2000)
17. Matlosz, M., W. Ehrfeld and J. P. Baselt, eds.: Microreaction Technology (IMRET 5). Springer, Berlin, Germany (2002)
18. Morf, W. E., O. T. Guenat and N. F. de Rooij; "Partial Electroosmotic Pumping in Complex Capillary Systems Part 1: Principles and General Theoretical Approach," Sensors Actuators, B72, 266- 272 (2001)
19. Nguyen, N.-T. and X. Huang; "Miniature Valveless Pumps Based on Printed Circuit Board Technique," Sensors Actuators. A88, 104-111 (2001)
20. Nguyen, N.-T., A. H. Meng, J. Blac and B. M. White; "Integrated Flow Sensor for in situ Measurement and Control of Acoustic Streaming in Flexural Plate Wave Micropumps," Sensors Actuators, A79, 115-121 (2000)
21. Nguyen, N.-T., X. Huang and T. K. Chuan; "MEMS-Micropumps: A Review," J. Fluids Eng., 124, 384-392 (2002)
22. Park, J.-H., K. Yoshida and S. Yokota; "Resonantly Driven Piezoelectric Micropump, Fabrication of a Micropump Having High Power Density," Mechatronics, 9, 687-702 (1999)
23. Peles, Y. P., L. P. Yarin and G. Hestroni; "Steady and Unsteady Flow in a Heated Capillary," Int. J. Multiphase Flow, 27, 577-598 (2001)
24. Peng, X.-F. and B.-X. Wang; "Forced Convection and Flow Boiling Heat Transfer for Liquid Flowing Through Microchannels," Int. J. Heat Mass Transfer, 36, 3421-3427 (1993)
25. Peng, X. F., H. Y. Hu and B. X. Wang, "Boiling Nucleation During Liquid Flow in Microchannels," Int. J. Heat Mass Transfer, 41, 101-106 (1998)
26. Peng, X. F., Y. Tiän and D. J. Lee; "Arguments on Microscale Boiling Dynamics," Microscale Thermophys, Eng., 6, 75-83 (2002)
27. Quandt, E., and A. Ludwig; "Magnetostrictive Actuation in Microsystems," Sensors Actuators, A81, 275-280 (2000)
28. Quiram, D. J., I.-M. Hsing. A. J. Franz, K. F. Jensen and M. A. Schmidt; "Design Issues for Membrane-based. Gas Phase Microchemical Systems," Chem. Eng. Sci., 55, 3065-3075 (2000)
29. Ramsey, J. M. and A. van den Berg. eds.; Micro Total Analysis System 2001. Kluwer Academic. Dordrecht. the Netherlands (2001)
30. Rife, J. C., M. I. Bell, J. S. Horwitz, M. N. Kabler, R. C. Y. Auyeung and W. J. Kim; "Miniature Valveless Ultrasonic Pumps and Mixers," Sensors Actuators, 86, 135-140 (2000)
31. Schomburg, W. K., R. Ahrens, W. Bacher, C. Goll, S. Meinzer and A. Quinte; "AMANDA-Low-Cost Production of Microfluidic Devices," Sensors Actuators, A70, 153-158 (1998)
32. Schubert, K., J. Brander, M. Fichtner, G. Linder, U. Schygulla and A. Wenka; "Microstructure Devices for Applications in Thermal and Chemical Process Engineering," Microscale Thermophys. Eng., 5, 17-39 (2001)
33. Thielicke, E. and E. Obermeier; "Microactuators and Their Technologies," Mechatronics, 10, 431-455 (2000)
34. Tsubota, T., D. Miyagawa, K. Kusakabe and S. Morooka; "Preparation of a Catalytic Reactor Composed of a Microchannel Etched on a Silicon Wafer," Kagaku Kogaku Ronbunshu. 26, 895-897 (2000)
35. Veenstra, T. T., J. W. Berenschot, J. G. E. Gardeniers, R. G. P. Sanders, M. C. Elwenspoek and A. van den Berg; "Use of Selective Anodic Bonding to Create Micropump Chambers with Virtually No Dead Volume," J. Electrochem. Soc., 148, G68- G72 (2001)
36. Xu, D., L Wang, G. Ding, Y. Zhou, A. Yu and B. Cai; "Characteristics and Fabrication of NiTi/Si Diaphragm Micropump," Sensors Actuators. A93, 87-92 (2001)
37. Yuen, P. K., L. J. Kricka and P. Wilding; "Semi-Disposable Microvalves for Use with Microfabricated Devices or Microchips," J. Micromech. Microeng., 10, 401-409 (2000)
38. Zhang L., E. N. Wang, J.-M. Koo, L. Jiang, K. E. Goodson, J. G. Santiago and T. W. Kenny; "Enhanced Nucleate Boiling in Microchannels," Proceedings of MEMS 2002. IEEE, pp. 89- 92, Las Vegas, USA (2002)